Novellus / AMAT System Upgrades
1. MKS Throttle valve Uprgade
2. Mag 7 Robot Upgrade
3. MC3 Controller Upgrade
4. Digital water Fllow switch Upgrade
5. Toggle Clean Upgrade
6. HDP Baside HE Upgrade
7. IOC Controller Upgrade
8. HDP Endpoint Upgrade
9. SEQUEL Fork Assembly Upgrade
10. RF Distribution Assembly Upgrade
11. SEQUEL RF Switch Upgrade
12. C1 system computer upgrade;
13. C2 MC3T controller upgrade;
14. C1/C2 ceramic fork assy upgrade;
15. C2-Sequel chamber ISO box PCB upgrade;
16. C2-Sequel new type SSR upgrade;
17. AMAT Endura5500 cooling chamber wafer position detector sensor upgrade.